Thermal-wave balancing flow sensor with low-drift power feedback

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چکیده

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Thermal-wave balancing flow sensor with low-drift power feedback

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ژورنال

عنوان ژورنال: Journal of Micromechanics and Microengineering

سال: 2014

ISSN: 0960-1317,1361-6439

DOI: 10.1088/0960-1317/24/5/055016